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Dan Doherty
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Dan Doherty
Dan Doherty
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Chemraz® 663: Sub-Zero Temperature Seals for Plasma Etch Processes
Greene Tweed Launches semi-chemraz.gtweed.com
Chemraz® solutions are extending the service life of electrostatic chucks (ESCs)
Greene Tweed provides an innovative Chemraz® E38 seal design that lasts longer than a typical o-ring
Chemraz® 629 significantly reduces particle contamination caused by process (plasma) exposure damage
Chemraz® SFX extends seal life and lowers cost of ownership in subfab applications
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