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Author: Dan Doherty

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Dan Doherty

Posts

  • Chemraz® 663: Sub-Zero Temperature Seals for Plasma Etch Processes
  • Greene Tweed Launches semi-chemraz.gtweed.com
  • Chemraz® solutions are extending the service life of electrostatic chucks (ESCs)
  • Greene Tweed provides an innovative Chemraz® E38 seal design that lasts longer than a typical o-ring
  • Chemraz® 629 significantly reduces particle contamination caused by process (plasma) exposure damage
  • Chemraz® SFX extends seal life and lowers cost of ownership in subfab applications

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