An electrostatic chuck (ESC) is a device that holds wafers in place during processing in certain semi chambers. During wafer processing and in situ cleaning, plasma may attack the ESC and erode its surfaces, causing particles and electrical issues that affect the wafer and yield.
Greene Tweed’s E-Band, composed of Chemraz®, a perfluoroelastomer (FFKM) designed to withstand the harsh chemistries of advanced etch and deposition wafer processing, is similar in shape to a strand of linguine.
The E-Band, located on the OD of the ESC, seals the interface of the ESC from plasma exposure and erosion, and extends the life of the ESC.
Chemraz® XPE, among other Chemraz® materials, has shown proven performance in E-Band applications. A very clean material with excellent plasma resistance, Chemraz® XPE is widely used in CVD and etch tools. Greene Tweed’s innovative installation tool design provides easy installation.
Chemraz® solutions help save time and lower cost of ownership, particularly in etch applications.
Instead of replacing your ESC, use a Chemraz® E-Band.
Click here to view an E-Band case study.