Greene Tweed’s many Chemraz® formulations are used by the world’s leading semiconductor fabs because of their superior performance and reliability.

Sealing solutions manufactured from Chemraz® perfluoroelastomers (FFKM) provide customers with reduced downtime and maintenance costs. Our Chemraz® seals are found in a variety of semiconductor segments, including Aqueous, Deposition, Electroplating, Etch, and Subfab.

As a fully fluorinated elastomer, Chemraz® has the broadest chemical resistance of any elastomeric material, combining the resilience and sealing force of an elastomer with the chemical resistance approaching that of PTFE.

Chemraz®’s distinctive chemical composition makes it well suited for a range of applications. Because of its low compression set, outstanding physical properties, and universal chemical resistance, Chemraz® provides an incredibly reliable seal. Chemraz® o-rings, gaskets, and custom elastomeric shapes can withstand a wide range of temperatures (-40°F to 615°F/-40°C to 324°C).

Our Chemraz® portfolio of materials offers grades that can provide:
• Minimal extractable ion content
• Exceptional chemical resistance
• Low particle generation
• High dimensional stability
• Minimal metallic ion content
• Exceptional plasma resistance

With fully qualified engineering, sales, and support personnel located throughout the Americas, Europe, and Asia, Greene Tweed can recommend the Chemraz® sealing solution that best fits your application.

Use the form below to contact a Greene Tweed engineer and discover how Chemraz® can improve reliability in your application.