Greene Tweed has created a new website designed to bring our customers the latest news and product information on Chermraz® perfluorelastomers (FFKM). The website has several new features, including: Interactive tools, such as an Elastomer Selection Guide, to help select the right Chemraz® materials for your application. Basic seal training for customers who are using Chemraz® materials. […]
An electrostatic chuck (ESC) is a device that holds wafers in place during processing in certain semi chambers. During wafer processing and in situ cleaning, plasma may attack the ESC and erode its surfaces, causing particles and electrical issues that affect the wafer and yield. Greene Tweed’s E-Band, composed of Chemraz®, a perfluoroelastomer (FFKM) designed […]
Chemraz® 629’s ultra-pure, nano-filler technology was designed to meet the rigorous demands of aggressive plasma systems.
Chemraz® SubFAB (SFX) is a custom-engineered FFKM that withstands harsh chemicals and high temperatures in today’s subfab environment.