Elastomer Selection Guide
Find and click on your specific application criteria on the selection wheel.
Then give it a spin for a Chemraz® seal material recommendation (more instructions on the bottom of this page).
If you don’t see your process effluent, contact your Greene Tweed representative.
[expander_maker id=”1″ more=”Read more” less=”Read less”]1) From the left side of the wheel, click on the fab segment (e.g., Deposition, Etch) you are operating in, or would like to search – your selected fab segment icon will appear in the center of the wheel.
2) Starting with the blue outer ring of the wheel, choose your node size. Node size refers to the size of the features (transistors) that you are creating on the chip.
3) Select the appropriate process (green ring), which refers to the process you are running or the process in which you are looking for a solution.
4) Choose the temperature (white ring) of the application that the solution will be exposed to.
5) Select the level of criticality of your seal location (light blue). An application is critical if it is in a process chamber. It is most critical if the seal application is close to or touching the wafer, thereby potentially causing particles (contaminants) in the process, or a fab event if a seal fails.
6) Your selected criteria will line up under the arrow above the wheel – now click Submit.
7) A Comparison Chart will appear below the wheel, providing Chemraz® solutions based on your specific criteria.[/expander_maker]