Greene Tweed Launches semi-chemraz.gtweed.com
- December 15, 2018
- News Article
Greene Tweed has created a new website designed to bring our customers the latest news and product information on Chermraz® perfluorelastomers (FFKM). The website has several new features, including: Interactive tools, such as an Elastomer Selection Guide, to help select the right Chemraz® materials for your application. Basic seal training for customers who are using Chemraz® materials. […]
Chemraz® solutions are extending the service life of electrostatic chucks (ESCs)
- December 14, 2018
- News Article
An electrostatic chuck (ESC) is a device that holds wafers in place during processing in certain semi chambers. During wafer processing and in situ cleaning, plasma may attack the ESC and erode its surfaces, causing particles and electrical issues that affect the wafer and yield. Greene Tweed’s E-Band, composed of Chemraz®, a perfluoroelastomer (FFKM) designed […]
Chemraz® 629 significantly reduces particle contamination caused by process (plasma) exposure damage
- November 27, 2018
- News Article
Chemraz® 629’s ultra-pure, nano-filler technology was designed to meet the rigorous demands of aggressive plasma systems.
Chemraz® SFX extends seal life and lowers cost of ownership in subfab applications
- November 15, 2018
- News Article
Chemraz® SubFAB (SFX) is a custom-engineered FFKM that withstands harsh chemicals and high temperatures in today’s subfab environment.